Publication:

Selective removal of high-k dielectrics

Date

2011
Proceedings Paper
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dc.contributor.authorShamiryan, Denis
dc.contributor.authorParaschiv, Vasile
dc.contributor.imecauthorParaschiv, Vasile
dc.date.accessioned2021-10-19T18:41:13Z
dc.date.available2021-10-19T18:41:13Z
dc.date.embargo9999-12-31
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19763
dc.source.beginpage311
dc.source.conferenceChina Semiconductor Technology International Conference - CSTIC
dc.source.conferencedate13/03/2011
dc.source.conferencelocationShanghai China
dc.source.endpage318
dc.title

Selective removal of high-k dielectrics

dc.typeProceedings paper
dspace.entity.typePublication
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