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Status and review of two-dimensional carrier and dopant profiling using scanning probe microscopy
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Status and review of two-dimensional carrier and dopant profiling using scanning probe microscopy
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Date
2000
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4276.pdf
71.76 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Wolf, Peter
;
Stephenson, Robert
;
Trenkler, Thomas
;
Clarysse, Trudo
;
Hantschel, Thomas
;
Vandervorst, Wilfried
Journal
J. Vacuum Science and Technology B
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1908
since deposited on 2021-10-14
Acq. date: 2025-12-16
Citations
Metrics
Views
1908
since deposited on 2021-10-14
Acq. date: 2025-12-16
Citations