Publication:

Super secondary grain growth in the barrier/seedlayer system

Date

2005-01
Proceedings Paper
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dc.contributor.authorVanstreels, Kris
dc.contributor.authorBrongersma, Sywert
dc.contributor.authorDemuynck, Steven
dc.contributor.authorD'Haen, Jan
dc.contributor.authorDe Ceuninck, Ward
dc.contributor.authorD'Olieslaeger, Marc
dc.contributor.authorMaex, Karen
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorBrongersma, Sywert
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorDe Ceuninck, Ward
dc.contributor.imecauthorD'Olieslaeger, Marc
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecBrongersma, Sywert::0000-0002-1755-3897
dc.date.accessioned2021-10-16T06:39:23Z
dc.date.available2021-10-16T06:39:23Z
dc.date.embargo9999-12-31
dc.date.issued2005-01
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11480
dc.source.beginpage327
dc.source.conferenceAdvanced Metallization Conference 2004
dc.source.conferencedate19/10/2004
dc.source.conferencelocationSan Diego, CA USA
dc.source.endpage331
dc.title

Super secondary grain growth in the barrier/seedlayer system

dc.typeProceedings paper
dspace.entity.typePublication
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