Publication:

SiGe channel formation for 3D vertical channel transistor applications

Date

2014
Meeting abstract
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dc.contributor.authorCapogreco, Elena
dc.contributor.authorLisoni, Judit
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorArreghini, Antonio
dc.contributor.authorVecchio, Emma
dc.contributor.authorNumata, Toshinori
dc.contributor.authorTan, Chi Lim
dc.contributor.authorDe Meyer, Kristin
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorVan Houdt, Jan
dc.contributor.imecauthorCapogreco, Elena
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorArreghini, Antonio
dc.contributor.imecauthorVecchio, Emma
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecArreghini, Antonio::0000-0002-7493-9681
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.date.accessioned2021-10-22T00:52:03Z
dc.date.available2021-10-22T00:52:03Z
dc.date.embargo9999-12-31
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23605
dc.identifier.urlhttp://www.emrs-strasbourg.com/index.php?option=com_abstract&task=view&id=276&day=2014-09-16&year=2014&Itemid=99999999&id_season
dc.source.beginpage6 2
dc.source.conferenceE-MRS Fall Meeting J: Alternative Integration in Si Microelectronics
dc.source.conferencedate15/09/2014
dc.source.conferencelocationWarsaw Poland
dc.title

SiGe channel formation for 3D vertical channel transistor applications

dc.typeMeeting abstract
dspace.entity.typePublication
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