Emissivity independent heating of 3D patterns

dc.contributor.author	Vanormelingen, Koen
dc.contributor.author	Granneman, Ernst
dc.contributor.author	Terhorst, Huub
dc.contributor.author	Rosseel, Erik
dc.contributor.author	Verheyden, Kurt
dc.contributor.imecauthor	Rosseel, Erik
dc.date.accessioned	2021-10-16T21:11:01Z
dc.date.available	2021-10-16T21:11:01Z
dc.date.embargo	9999-12-31
dc.date.issued	2007
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/13142
dc.source.beginpage	141
dc.source.conference	Extended Abstracts of the 7th International Workshop on Junction Technology - IWJT
dc.source.conferencedate	8/06/2007
dc.source.conferencelocation	Kyoto Japan
dc.source.endpage	142
dc.title	Emissivity independent heating of 3D patterns
dc.type	Proceedings paper
dspace.entity.type	Publication
Files	Original bundle Name: 15767.pdf Size: 600 KB Format: Adobe Portable Document Format Download
Publication available in collections:	Conference contributions

Date