Publication:
Dielectric films for advanced microelectronics
Date
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.author | Green, Martin | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-16T15:01:57Z | |
| dc.date.available | 2021-10-16T15:01:57Z | |
| dc.date.issued | 2007 | |
| dc.identifier.isbn | 978-0-470-013 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11683 | |
| dc.source.numberofpages | 486 | |
| dc.title | Dielectric films for advanced microelectronics | |
| dc.type | Book | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |