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Conference contributions
Conformal doping of FINFET's: a fabrication and metrology challenge
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Conformal doping of FINFET's: a fabrication and metrology challenge
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Date
2008
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vandervorst, Wilfried
;
Eyben, Pierre
;
Mody, Jay
;
Jurczak, Gosia
;
Nguyen, Duy
;
Takeuchi, Shotaro
;
Leys, Frederik
;
Loo, Roger
;
Caymax, Matty
;
Everaert, Jean-Luc
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1887
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Acq. date: 2025-12-09
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Views
1887
since deposited on 2021-10-17
1
last month
Acq. date: 2025-12-09
Citations