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Measurement of residual stress in thin films by using the optical microprobe
Publication:
Measurement of residual stress in thin films by using the optical microprobe
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Date
1998
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Atkinson, A.
;
Clarke, D. R.
;
Jain, Suresh
;
Pinardi, Kuntjoro
;
Webb, S.
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Acq. date: 2026-01-26
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Views
1915
since deposited on 2021-09-30
1
last month
Acq. date: 2026-01-26
Citations