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Measurement of residual stress in thin films by using the optical microprobe
Publication:
Measurement of residual stress in thin films by using the optical microprobe
Date
1998
Proceedings Paper
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2517.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Atkinson, A.
;
Clarke, D. R.
;
Jain, Suresh
;
Pinardi, Kuntjoro
;
Webb, S.
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1908
since deposited on 2021-09-30
Acq. date: 2025-10-23
Citations
Metrics
Views
1908
since deposited on 2021-09-30
Acq. date: 2025-10-23
Citations