Publication:
A numerical study on nano-indentation induced fracture of low dielectric constant brittle thin films using cube corner probes
Date
| dc.contributor.author | Zahedmanesh, Houman | |
| dc.contributor.author | Vanstreels, Kris | |
| dc.contributor.author | Gonzalez, Mario | |
| dc.contributor.imecauthor | Zahedmanesh, Houman | |
| dc.contributor.imecauthor | Vanstreels, Kris | |
| dc.contributor.imecauthor | Gonzalez, Mario | |
| dc.contributor.orcidimec | Vanstreels, Kris::0000-0002-4420-0966 | |
| dc.date.accessioned | 2021-10-23T17:43:27Z | |
| dc.date.available | 2021-10-23T17:43:27Z | |
| dc.date.issued | 2016 | |
| dc.identifier.issn | 0167-9317 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/27649 | |
| dc.identifier.url | http://www.sciencedirect.com/science/article/pii/S0167931716300065 | |
| dc.source.beginpage | 108 | |
| dc.source.endpage | 115 | |
| dc.source.journal | Microelectronic Engineering | |
| dc.source.volume | 156 | |
| dc.title | A numerical study on nano-indentation induced fracture of low dielectric constant brittle thin films using cube corner probes | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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