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dc.contributor.author	Donaton, Ricardo
dc.date.accessioned	2021-10-06T11:06:08Z
dc.date.available	2021-10-06T11:06:08Z
dc.date.issued	1999-05
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/3429
dc.title	Silicide growth mechanisms on Si and SiGe substrates
dc.type	PHD thesis
dspace.entity.type	Publication
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Silicide growth mechanisms on Si and SiGe substrates

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