Publication:
Immersion and electrochemical deposition of Ru on Si
Date
| dc.contributor.author | Philipsen, Harold | |
| dc.contributor.author | Monnens, Wouter | |
| dc.contributor.imecauthor | Philipsen, Harold | |
| dc.contributor.orcidimec | Philipsen, Harold::0000-0002-5029-1104 | |
| dc.date.accessioned | 2021-10-26T01:10:17Z | |
| dc.date.available | 2021-10-26T01:10:17Z | |
| dc.date.issued | 2018 | |
| dc.identifier.issn | 0013-4686 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/31524 | |
| dc.identifier.url | https://doi.org/10.1016/j.electacta.2018.04.093 | |
| dc.source.beginpage | 306 | |
| dc.source.endpage | 315 | |
| dc.source.journal | Electrochimica Acta | |
| dc.source.volume | 274C | |
| dc.title | Immersion and electrochemical deposition of Ru on Si | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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