Publication:
Tip-on-tip: a novel AFM tip configuration for the electrical characterization of semiconductor devices
Date
| dc.contributor.author | Hantschel, Thomas | |
| dc.contributor.author | Trenkler, Thomas | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Malave, A. | |
| dc.contributor.author | Kulisch, W. | |
| dc.contributor.author | Oesterschulze, E. | |
| dc.contributor.author | Buechel, D. | |
| dc.contributor.imecauthor | Hantschel, Thomas | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.orcidimec | Hantschel, Thomas::0000-0001-9476-4084 | |
| dc.date.accessioned | 2021-09-30T12:08:22Z | |
| dc.date.available | 2021-09-30T12:08:22Z | |
| dc.date.issued | 1998 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2620 | |
| dc.source.conference | MNE 98 - Micro- and Nano-Engineering Conference; 22-24 Sept. 1998; Leuven, Belgium. | |
| dc.source.conferencelocation | ||
| dc.title | Tip-on-tip: a novel AFM tip configuration for the electrical characterization of semiconductor devices | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |