Publication:

Thermal ALD for industrial Si solar cells: advanced cleaning

Date

2010
Meeting abstract
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dc.contributor.authorVermang, Bart
dc.contributor.authorRothschild, Aude
dc.contributor.authorBearda, Twan
dc.contributor.authorJohn, Joachim
dc.contributor.authorPoortmans, Jef
dc.contributor.authorMertens, Robert
dc.contributor.imecauthorVermang, Bart
dc.contributor.imecauthorJohn, Joachim
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.imecauthorMertens, Robert
dc.contributor.orcidimecVermang, Bart::0000-0003-2669-2087
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.date.accessioned2021-10-18T23:52:18Z
dc.date.available2021-10-18T23:52:18Z
dc.date.embargo9999-12-31
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18283
dc.source.beginpage206
dc.source.conference10th International Symposium on Ultra-Clean Processing of Semiconductor Devices - UCPSS
dc.source.conferencedate19/09/2010
dc.source.conferencelocationOostende Belgium
dc.source.endpage207
dc.title

Thermal ALD for industrial Si solar cells: advanced cleaning

dc.typeMeeting abstract
dspace.entity.typePublication
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