Publication:
On the asymmetric splitting of CBED HOLZ lines under the gate of recessed SiGe source/drain transistors
Date
| dc.contributor.author | Benedetti, Alessandro | |
| dc.contributor.author | Bender, Hugo | |
| dc.contributor.imecauthor | Bender, Hugo | |
| dc.date.accessioned | 2021-10-16T15:03:53Z | |
| dc.date.available | 2021-10-16T15:03:53Z | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11717 | |
| dc.source.beginpage | 411 | |
| dc.source.conference | Microscopy of Semiconducting Materials XV | |
| dc.source.conferencedate | 2/04/2007 | |
| dc.source.conferencelocation | Cambridge UK | |
| dc.source.endpage | 414 | |
| dc.title | On the asymmetric splitting of CBED HOLZ lines under the gate of recessed SiGe source/drain transistors | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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