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Modeling FinFET metal gate stack resistance for 14nm node and beyond
Publication:
Modeling FinFET metal gate stack resistance for 14nm node and beyond
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Date
2015
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Miyaguchi, Kenichi
;
Parvais, Bertrand
;
Ragnarsson, Lars-Ake
;
Wambacq, Piet
;
Raghavan, Praveen
;
Mercha, Abdelkarim
;
Mocuta, Anda
;
Verkest, Diederik
;
Thean, Aaron
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Downloads
1
since deposited on 2021-10-22
Acq. date: 2025-12-16
Views
1885
since deposited on 2021-10-22
1
last month
Acq. date: 2025-12-16
Citations