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The influence of the angle of incidence in megasonic cleaning
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The influence of the angle of incidence in megasonic cleaning
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Date
2010
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Brems, Steven
;
Hauptmann, Marc
;
Camerotto, Elisabeth
;
Xu, XiuMei
;
De Gendt, Stefan
;
Heyns, Marc
;
Mertens, Paul
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Views
1840
since deposited on 2021-10-18
1
last month
Acq. date: 2025-12-15
Citations