Publication:
Porous low-k dielectrics for advanced ULSI technology
Date
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.date.accessioned | 2021-10-16T00:43:42Z | |
| dc.date.available | 2021-10-16T00:43:42Z | |
| dc.date.issued | 2005-09 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10051 | |
| dc.source.beginpage | 15 | |
| dc.source.conference | 7th International Seminar on Porous Glasses - Special Glasses | |
| dc.source.conferencedate | 10/09/2005 | |
| dc.source.conferencelocation | Wroclaw Poland | |
| dc.source.endpage | 15 | |
| dc.title | Porous low-k dielectrics for advanced ULSI technology | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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