Publication:
Impact of the oxygen concentration on the quantification of secondary ion mass spectrometry profiles in Si
Date
| dc.contributor.author | Janssens, Tom | |
| dc.contributor.thesisadvisor | Verbeke, O. | |
| dc.contributor.thesisadvisor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-14T21:53:53Z | |
| dc.date.available | 2021-10-14T21:53:53Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2002-10 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6430 | |
| dc.title | Impact of the oxygen concentration on the quantification of secondary ion mass spectrometry profiles in Si | |
| dc.type | PHD thesis | |
| dspace.entity.type | Publication | |
| Files | Original bundle
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| Publication available in collections: |