Publication:

Etch rate study of germanium, GaAs, and InGaAs: a challenge in semiconductor processing.

Date

2008

Meeting abstract

Simple item page Full metadata Statistics

Files

16998.pdf 49.81 KB

Author(s)

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Van Steenbergen, Jan

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Statistics

1900 since deposited on 2021-10-17

Acq. date: 2026-05-19