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Etch rate study of germanium, GaAs, and InGaAs: a challenge in semiconductor processing.
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1897 since deposited on 2021-10-17
2last month
Acq. date: 2026-02-27
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Statistics
Views
1897 since deposited on 2021-10-17
2last month
Acq. date: 2026-02-27
Citations