Publication:

Passive temperature-compensation of MEM resonators

Date

 
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorJansen, Roelof
dc.contributor.authorStoffels, Steve
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorDe Raedt, Walter
dc.contributor.authorTilmans, Harrie
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorJansen, Roelof
dc.contributor.imecauthorStoffels, Steve
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.accessioned2021-10-18T21:02:23Z
dc.date.available2021-10-18T21:02:23Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17912
dc.source.conferenceNSTI Nanotech Conference and Expo
dc.source.conferencedate21/06/2010
dc.source.conferencelocationAnaheim, CA USA
dc.title

Passive temperature-compensation of MEM resonators

dc.typeProceedings paper
dspace.entity.typePublication
Files
Publication available in collections: