Publication:

Impact of acoustical reflections on megasonic cleaning performance

Date

2009
Proceedings Paper
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dc.contributor.authorBrems, Steven
dc.contributor.authorHauptmann, Marc
dc.contributor.authorCamerotto, Elisabeth
dc.contributor.authorPacco, Antoine
dc.contributor.authorHalder, Sandip
dc.contributor.authorZijlstra, Aaldert
dc.contributor.authorDoumen, Geert
dc.contributor.authorBearda, Twan
dc.contributor.authorMertens, Paul
dc.contributor.imecauthorBrems, Steven
dc.contributor.imecauthorCamerotto, Elisabeth
dc.contributor.imecauthorPacco, Antoine
dc.contributor.imecauthorHalder, Sandip
dc.contributor.imecauthorDoumen, Geert
dc.contributor.imecauthorMertens, Paul
dc.contributor.orcidimecBrems, Steven::0000-0002-0282-8528
dc.contributor.orcidimecHalder, Sandip::0000-0002-6314-2685
dc.date.accessioned2021-10-17T21:28:05Z
dc.date.available2021-10-17T21:28:05Z
dc.date.embargo9999-12-31
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15040
dc.source.beginpage287
dc.source.conferenceCleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 11
dc.source.conferencedate4/10/2009
dc.source.conferencelocationVienna Austria
dc.source.endpage294
dc.title

Impact of acoustical reflections on megasonic cleaning performance

dc.typeProceedings paper
dspace.entity.typePublication
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