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Fabrication of high qualtiy Ge virtual substrates by selective epitaxial growth in shallow trench isolated Si (001) trenches
Publication:
Fabrication of high qualtiy Ge virtual substrates by selective epitaxial growth in shallow trench isolated Si (001) trenches
Date
2010
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Wang, Gang
;
Loo, Roger
;
Takeuchi, Shotaro
;
Souriau, Laurent
;
Lin, Vic
;
Moussa, Alain
;
Bender, Hugo
;
De Jaeger, Brice
;
Ong, Patrick
;
Lee, Willie
;
Meuris, Marc
;
Caymax, Matty
;
Vandervorst, Wilfried
;
Blanpain, Bart
;
Heyns, Marc
Journal
Thin Solid Films
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1958
since deposited on 2021-10-19
Acq. date: 2025-10-23
Citations
Metrics
Views
1958
since deposited on 2021-10-19
Acq. date: 2025-10-23
Citations