Publication:

Epitaxial Si/SiGe Multi-Stacks: From Stacked Nano-Sheet to Fork-Sheet and CFET Devices

Date

2025
Journal article
https://doi.org/10.1149/2162-8777/ada79f
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Published version 1.88 MB

Author(s)

Loo, Roger  
;
Akula, Anjani  
;
Shimura, Yosuke  
;
Porret, Clément  
;
Rosseel, Erik  
;
Dursap, Thomas  
;
Hikavyy, Andriy  
;
Beggiato, Matteo  
;
Bogdanowicz, Janusz  
;
Merkulov, Alex  
;
Ayyad, Mustafa  
;
Han, Han  
;
Richard, Olivier  
;
Impagnatiello, Andrea  
;
Wang, D.
;
Yamamoto, K.
;
Sipocz, T.
;
Kerekes, A.
;
Mertens, Hans  
;
Horiguchi, Naoto  
;
Langer, Robert  

Journal

ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY

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580 since deposited on 2025-01-26
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455 since deposited on 2025-01-26
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Acq. date: 2026-02-28

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