Publication:
Chemisorption reaction mechanisms for atomic layer deposition of high-k oxides on high mobility channels
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1875 since deposited on 2021-10-18
1last month
Acq. date: 2025-12-11
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Metrics
Views
1875 since deposited on 2021-10-18
1last month
Acq. date: 2025-12-11
Citations