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At the Extreme of 3D-NAND Scaling: 25 nm Z-Pitch with 10 nm Word Line Cells
Publication:
At the Extreme of 3D-NAND Scaling: 25 nm Z-Pitch with 10 nm Word Line Cells
Date
2022
Proceedings Paper
https://doi.org/10.1109/IMW52921.2022.9779303
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Rachidi, Sana
;
Arreghini, Antonio
;
Verreck, Devin
;
Donadio, Gabriele Luca
;
Banerjee, Kaustuv
;
Katcko, Kostantine
;
Oniki, Yusuke
;
Van den Bosch, Geert
;
Rosmeulen, Maarten
Journal
na
Abstract
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1617
since deposited on 2022-10-30
Acq. date: 2025-10-24
Citations
Metrics
Views
1617
since deposited on 2022-10-30
Acq. date: 2025-10-24
Citations