Publication:

At the Extreme of 3D-NAND Scaling: 25 nm Z-Pitch with 10 nm Word Line Cells

Date

2022

Proceedings Paper

https://doi.org/10.1109/imw52921.2022.9779303

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Author(s)

;

Arreghini, Antonio

;

;

Donadio, Gabriele Luca

;

Banerjee, Kaustuv

;

Katcko, Kostantine

;

;

Van den Bosch, Geert

;

Rosmeulen, Maarten

Journal

na

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Acq. date: 2026-08-08