Publication:

Materials compatibility and organic build-up during ozone-based cleanings of semiconductor devices

Date

2001
Proceedings Paper
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dc.contributor.authorDe Smedt, Frank
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorHeyns, Marc
dc.contributor.authorVinckier, Chris
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-14T16:46:56Z
dc.date.available2021-10-14T16:46:56Z
dc.date.embargo9999-12-31
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5205
dc.source.beginpage63
dc.source.conferenceUltra Clean Processing of Silicon Surfaces 2000: Proceedings of the 5th International Conference - UCPSS
dc.source.conferencedate18/09/2000
dc.source.conferencelocationOostende Belgium
dc.source.endpage66
dc.title

Materials compatibility and organic build-up during ozone-based cleanings of semiconductor devices

dc.typeProceedings paper
dspace.entity.typePublication
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