Publication:
Analysis of silicide / diffusion contact resistance making use of transmission line stuctures
Date
| dc.contributor.author | Akheyar, Amal | |
| dc.contributor.author | Lauwers, Anne | |
| dc.contributor.author | Lindsay, Richard | |
| dc.contributor.author | de Potter de ten Broeck, Muriel | |
| dc.contributor.author | Tempel, Georg | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Lauwers, Anne | |
| dc.contributor.imecauthor | de Potter de ten Broeck, Muriel | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-14T21:06:58Z | |
| dc.date.available | 2021-10-14T21:06:58Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5939 | |
| dc.source.beginpage | 53 | |
| dc.source.conference | Silicon Materials - Processing, Characterization, and Reliability | |
| dc.source.conferencedate | 1/04/2002 | |
| dc.source.conferencelocation | San Francisco, CA USA | |
| dc.source.endpage | 58 | |
| dc.title | Analysis of silicide / diffusion contact resistance making use of transmission line stuctures | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |