Publication:
Full spectral analysis of line edge roughness
Date
| dc.contributor.author | Leunissen, Peter | |
| dc.contributor.author | Lorusso, Gian | |
| dc.contributor.author | Ercken, Monique | |
| dc.contributor.author | Croon, Jeroen | |
| dc.contributor.author | Yang, H. | |
| dc.contributor.author | Azordegan, A. | |
| dc.contributor.author | DiBiase, Tony | |
| dc.contributor.imecauthor | Lorusso, Gian | |
| dc.contributor.imecauthor | Ercken, Monique | |
| dc.date.accessioned | 2021-10-16T02:53:13Z | |
| dc.date.available | 2021-10-16T02:53:13Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10773 | |
| dc.source.beginpage | 499 | |
| dc.source.conference | Metrology, Inspection, and Process Control for Microlithography XIX | |
| dc.source.conferencedate | 28/02/2005 | |
| dc.source.conferencelocation | San Jose, A USA | |
| dc.source.endpage | 509 | |
| dc.title | Full spectral analysis of line edge roughness | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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