Publication:
A synchrotron radiation photoelectron spectroscopy study on atomic-scale wet etching of InAs (111)-A and (111)-B in acidic peroxide solutions: surface chemistry versus kinetics
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| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.orcid | 0000-0003-3775-3578 | |
| cris.virtual.orcid | 0000-0002-1085-4232 | |
| cris.virtual.orcid | 0000-0003-0257-2603 | |
| cris.virtual.orcid | 0009-0006-5211-6402 | |
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| cris.virtualsource.orcid | 1fe10fb2-6e56-49b1-8698-18ce92695cda | |
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| cris.virtualsource.orcid | d45cb539-5ee0-4d9d-9078-c68fb9e7aa2b | |
| dc.contributor.author | Abrenica, Graniel | |
| dc.contributor.author | Lebedev, M. V. | |
| dc.contributor.author | Fingerle, M. | |
| dc.contributor.author | Arnauts, Sophia | |
| dc.contributor.author | Calvet, W. | |
| dc.contributor.author | Mayer, T. | |
| dc.contributor.author | De Gendt, Stefan | |
| dc.contributor.author | van Dorp, Dennis | |
| dc.contributor.imecauthor | Abrenica, Graniel | |
| dc.contributor.imecauthor | Arnauts, Sophia | |
| dc.contributor.imecauthor | De Gendt, Stefan | |
| dc.contributor.imecauthor | van Dorp, Dennis | |
| dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
| dc.contributor.orcidimec | van Dorp, Dennis::0000-0002-1085-4232 | |
| dc.contributor.orcidimec | Abrenica, Graniel::0000-0003-0257-2603 | |
| dc.contributor.orcidimec | Arnauts, Sophia::0009-0006-5211-6402 | |
| dc.date.accessioned | 2022-01-19T10:01:53Z | |
| dc.date.available | 2022-01-15T02:07:31Z | |
| dc.date.available | 2022-01-19T10:01:53Z | |
| dc.date.issued | 2022 | |
| dc.description.wosFundingText | The authors acknowledge the imec Industrial Affiliation Program on III-V/Ge devices. The authors thank Helmholtz-Zentrum Berlin (HZB) for the allocation of synchrotron radiation beamtime. This research has been supported also by the project CALIPSOplus under the Grant Agreement 730872 from the EU Framework Program for Research and Innovation HORIZON 2020. The authors also would like to thank Frank Holsteyns for management support. MVL acknowledges the support of the Russian Foundation for Basic Research (project 20-03-00523). | |
| dc.identifier.doi | 10.1016/j.mtchem.2021.100728 | |
| dc.identifier.issn | 2468-5194 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/38745 | |
| dc.publisher | ELSEVIER SCI LTD | |
| dc.source.beginpage | 100728 | |
| dc.source.issue | na | |
| dc.source.journal | MATERIALS TODAY CHEMISTRY | |
| dc.source.numberofpages | 7 | |
| dc.source.volume | 23 | |
| dc.subject.keywords | SEMICONDUCTOR/ELECTROLYTE INTERFACES | |
| dc.subject.keywords | GAAS | |
| dc.subject.keywords | PASSIVATION | |
| dc.subject.keywords | GAAS(100) | |
| dc.subject.keywords | GROWTH | |
| dc.subject.keywords | HCL | |
| dc.subject.keywords | GE | |
| dc.title | A synchrotron radiation photoelectron spectroscopy study on atomic-scale wet etching of InAs (111)-A and (111)-B in acidic peroxide solutions: surface chemistry versus kinetics | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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