Cost-effective cleaning and high-quality thin gate oxides

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Author(s)

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Cornelissen, Ingrid

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De Gendt, Stefan

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Degraeve, Robin

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Groeseneken, Guido

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Loewenstein, Lee

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Schaekers, Marc

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Vandervorst, Wilfried

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Journal

IBM Journal of Research and Development

Metrics

2009 since deposited on 2021-10-06

Acq. date: 2025-12-08