Publication:

Cost-effective cleaning and high-quality thin gate oxides

Date

1999

Journal article

Simple item page Full metadata Statistics

Author(s)

;

;

Cornelissen, Ingrid

;

De Gendt, Stefan

;

Degraeve, Robin

;

Groeseneken, Guido

;

;

;

Loewenstein, Lee

;

;

;

;

;

Schaekers, Marc

;

;

Vandervorst, Wilfried

;

;

Journal

IBM Journal of Research and Development

Statistics

2015 since deposited on 2021-10-06

2last month

2last week

Acq. date: 2026-09-20