Publication:

Stress release structures for actuator beams with a stress gradient

Date

2007
Journal article
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dc.contributor.authorKlaasse, Gerard
dc.contributor.authorPuers, Bob
dc.contributor.authorTilmans, Harrie
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.accessioned2021-10-16T17:09:19Z
dc.date.available2021-10-16T17:09:19Z
dc.date.embargo9999-12-31
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12408
dc.source.beginpage2093
dc.source.endpage2101
dc.source.issue10
dc.source.journalJournal of Micromechanics and Microengineering
dc.source.volume17
dc.title

Stress release structures for actuator beams with a stress gradient

dc.typeJournal article
dspace.entity.typePublication
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