Publication:
Model for predicting spurious modes caused by fringing fields in lateral electrostatic actuators for MEM resonators
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1808 since deposited on 2021-10-18
2last month
Acq. date: 2026-08-06
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Views
1808 since deposited on 2021-10-18
2last month
Acq. date: 2026-08-06
Citations