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Interlevel dielectric engineering for improved device performance in half-micron CMOS
Publication:
Interlevel dielectric engineering for improved device performance in half-micron CMOS
Date
1994
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Forester, Lynn
;
Collins, Tom
;
Van den Bosch, Geert
;
Meynen, Herman
;
Coenegrachts, Bart
;
Van den hove, Luc
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2029
since deposited on 2021-09-29
Acq. date: 2025-10-23
Citations
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Views
2029
since deposited on 2021-09-29
Acq. date: 2025-10-23
Citations