Publication:
Impact of the pre-epi bake conditions in embedded Si1-xGex source/drain junctions
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1927 since deposited on 2021-10-17
Acq. date: 2026-01-10
Citations
Metrics
Views
1927 since deposited on 2021-10-17
Acq. date: 2026-01-10
Citations