Publication:
Non-contact metrology for inversion charge carrier mobility by corona charge and photovoltage measurements on blank wafers with a gate dielectric
Date
| dc.contributor.author | Everaert, Jean-Luc | |
| dc.contributor.author | Rosseel, Erik | |
| dc.contributor.author | Pap, Aron | |
| dc.contributor.author | Meszaros, Albert | |
| dc.contributor.author | Dekoster, Johan | |
| dc.contributor.author | Pavelka, Tibor | |
| dc.contributor.imecauthor | Everaert, Jean-Luc | |
| dc.contributor.imecauthor | Rosseel, Erik | |
| dc.contributor.imecauthor | Dekoster, Johan | |
| dc.date.accessioned | 2021-10-18T16:17:39Z | |
| dc.date.available | 2021-10-18T16:17:39Z | |
| dc.date.issued | 2010 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17088 | |
| dc.identifier.url | http://www.wodim2010.sk/program.html | |
| dc.source.conference | 16th Workshop on Dielectrics in Microelectronics- WoDIM | |
| dc.source.conferencedate | 28/06/2010 | |
| dc.source.conferencelocation | Bratislava Slovakia | |
| dc.title | Non-contact metrology for inversion charge carrier mobility by corona charge and photovoltage measurements on blank wafers with a gate dielectric | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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