Defect-free isolation on high-thermal-conductivity SOI substrates for complementary BiCMOS technology

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Author(s)

Van Wichelen, Koen

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Devriendt, Katia

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Vandevelde, Bart

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Soonekindt, Christophe

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Shahar, Abdul Hadi

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Van Huylenbroeck, Stefaan

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Decoutere, Stefaan

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Drobny, Vladimir

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1998 since deposited on 2021-10-18

Acq. date: 2025-10-23