Publication:
Ultra-high data density MEMS memory device
Date
| dc.contributor.author | Heck, John | |
| dc.contributor.author | Adams, Don | |
| dc.contributor.author | Belov, Nicolai | |
| dc.contributor.author | Chou, T-K.A. | |
| dc.contributor.author | Kim, B. | |
| dc.contributor.author | Ma, Q. | |
| dc.contributor.author | Rao, V. | |
| dc.contributor.author | Severi, Simone | |
| dc.contributor.author | Tchelepi, G. | |
| dc.contributor.author | Witvrouw, Ann | |
| dc.contributor.imecauthor | Severi, Simone | |
| dc.date.accessioned | 2021-10-17T22:46:15Z | |
| dc.date.available | 2021-10-17T22:46:15Z | |
| dc.date.issued | 2009 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/15447 | |
| dc.source.conference | 35th International Conference on Micro- and Nano Engineering - MNE | |
| dc.source.conferencedate | 28/09/2009 | |
| dc.source.conferencelocation | Gent Belgium | |
| dc.title | Ultra-high data density MEMS memory device | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |