Publication:

Time-frequency analysis assisted determination of ruthenium optical constants in the sub-EUV spectral range 8 nm-23.75 nm

Date

2021
Journal article
https://doi.org/10.1364/OE.426029
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dc.contributor.authorSaadeh, Qais
dc.contributor.authorNaujok, Philipp
dc.contributor.authorPhilipsen, Vicky
dc.contributor.authorHoenicke, Philipp
dc.contributor.authorLaubis, Christian
dc.contributor.authorBuchholz, Christian
dc.contributor.authorAndrle, Anna
dc.contributor.authorStadelhoff, Christian
dc.contributor.authorMentzel, Heiko
dc.contributor.authorSchoenstedt, Anja
dc.contributor.authorSoltwisch, Victor
dc.contributor.authorScholze, Frank
dc.contributor.imecauthorPhilipsen, Vicky
dc.contributor.orcidimecPhilipsen, Vicky::0000-0002-2959-432X
dc.date.accessioned2022-04-21T08:14:07Z
dc.date.available2021-12-23T02:06:13Z
dc.date.available2022-03-28T11:53:08Z
dc.date.available2022-04-08T08:43:39Z
dc.date.available2022-04-21T08:14:07Z
dc.date.issued2021
dc.identifier.doi10.1364/OE.426029
dc.identifier.issn1094-4087
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/38655
dc.publisherOPTICAL SOC AMER
dc.source.beginpage40993
dc.source.endpage41013
dc.source.issue25
dc.source.journalOPTICS EXPRESS
dc.source.numberofpages21
dc.source.volume29
dc.subject.keywordsX-RAY REFLECTIVITY
dc.subject.keywordsTHIN-FILM
dc.subject.keywordsREFLECTOMETRY
dc.subject.keywordsREFLECTANCE
dc.subject.keywordsSURFACE
dc.subject.keywordsLAYER
dc.subject.keywordsPHOTOABSORPTION
dc.subject.keywordsULTRAVIOLET
dc.subject.keywordsTRANSFORM
dc.subject.keywordsOPTIMIZATION
dc.title

Time-frequency analysis assisted determination of ruthenium optical constants in the sub-EUV spectral range 8 nm-23.75 nm

dc.typeJournal article
dspace.entity.typePublication
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