Publication:
Investigation of guanidine carbonate-based slurries for chemical Mechanical polishing of Ru/TiN barrier films with minimal corrosion
Date
| dc.contributor.author | Sagi, K.V. | |
| dc.contributor.author | Amanapu, H.P. | |
| dc.contributor.author | Teugels, Lieve | |
| dc.contributor.author | Babu, S.V. | |
| dc.contributor.imecauthor | Teugels, Lieve | |
| dc.contributor.orcidimec | Teugels, Lieve::0000-0002-6613-9414 | |
| dc.date.accessioned | 2021-10-22T05:26:27Z | |
| dc.date.available | 2021-10-22T05:26:27Z | |
| dc.date.issued | 2014 | |
| dc.identifier.issn | 2162-8769 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/24475 | |
| dc.identifier.url | http://jss.ecsdl.org/content/3/7/P227/F5.expansion.html | |
| dc.source.beginpage | P227 | |
| dc.source.endpage | P234 | |
| dc.source.issue | 7 | |
| dc.source.journal | ECS Journal of Solid State Science and Technology | |
| dc.source.volume | 3 | |
| dc.title | Investigation of guanidine carbonate-based slurries for chemical Mechanical polishing of Ru/TiN barrier films with minimal corrosion | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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