Publication:

Physical characterisation of high-gate stacks

Date

2002

Presentation

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Author(s)

Vandervorst, Wilfried

;

;

Conard, Thierry

;

Richard, Olivier

;

;

;

;

De Gendt, Stefan

;

Cosnier, Vincent

;

;

;

Cartier, Eduard

;

Statistics

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Acq. date: 2026-09-15