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Physical characterisation of high-gate stacks
Publication:
Physical characterisation of high-gate stacks
Date
2002
Presentation
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vandervorst, Wilfried
;
Bender, Hugo
;
Conard, Thierry
;
Richard, Olivier
;
Zhao, Chao
;
Brijs, Bert
;
Caymax, Matty
;
De Gendt, Stefan
;
Cosnier, Vincent
;
Chen, Jerry
;
Kluth, J.
;
Cartier, Eduard
;
Green, Martin
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2062
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
2062
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations