Publication:

Effect of TSV presence on FEOL yield and reliability

Date

2013

Proceedings Paper

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Files

26296.pdf 692.86 KB

Author(s)

Kauerauf, Thomas

;

;

;

Redolfi, Augusto

;

;

Torregiani, Cristina

;

Groeseneken, Guido

;

Metrics

1915 since deposited on 2021-10-21

Acq. date: 2025-12-10