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Effect of TSV presence on FEOL yield and reliability
Publication:
Effect of TSV presence on FEOL yield and reliability
Date
2013
Proceedings Paper
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26296.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kauerauf, Thomas
;
Branka, Anna
;
Croes, Kristof
;
Redolfi, Augusto
;
Civale, Yann
;
Torregiani, Cristina
;
Groeseneken, Guido
;
Beyne, Eric
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1914
since deposited on 2021-10-21
Acq. date: 2025-10-23
Citations
Metrics
Views
1914
since deposited on 2021-10-21
Acq. date: 2025-10-23
Citations