Publication:
Bottom electrode and barrier materials issues in stacked capacitor type ferroelectric memories
Date
| dc.contributor.author | Norga, Gerd | |
| dc.contributor.author | Wouters, Dirk | |
| dc.date.accessioned | 2021-10-14T13:29:33Z | |
| dc.date.available | 2021-10-14T13:29:33Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2000 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4630 | |
| dc.source.beginpage | 205 | |
| dc.source.endpage | 212 | |
| dc.source.issue | 1_4 | |
| dc.source.journal | Integrated Ferroelectrics | |
| dc.source.volume | 31 | |
| dc.title | Bottom electrode and barrier materials issues in stacked capacitor type ferroelectric memories | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |