Publication:
Processing toolkit development for 2D material integration in 300mm silicon production line
Date
| dc.contributor.author | Huyghebaert, Cedric | |
| dc.contributor.imecauthor | Huyghebaert, Cedric | |
| dc.contributor.orcidimec | Huyghebaert, Cedric::0000-0001-6043-7130 | |
| dc.date.accessioned | 2021-10-27T10:39:55Z | |
| dc.date.available | 2021-10-27T10:39:55Z | |
| dc.date.issued | 2019 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/33185 | |
| dc.source.conference | 2019 Graphene and Beyond Workshop and the Graphene Flagship US-EU 2D Workshop | |
| dc.source.conferencedate | 8/05/2019 | |
| dc.source.conferencelocation | State College, PA USA | |
| dc.title | Processing toolkit development for 2D material integration in 300mm silicon production line | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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