Publication:
Thin silicon layer as heat channel for low-loss SiN tunable devices
| dc.contributor.author | Caer, Charles | |
| dc.contributor.author | Dwivedi, Sarvagya Paavan | |
| dc.contributor.imecauthor | Caer, Charles | |
| dc.contributor.imecauthor | Dwivedi, Sarvagya Paavan | |
| dc.contributor.orcidimec | Caer, Charles::0000-0002-2735-2423 | |
| dc.contributor.orcidimec | Dwivedi, Sarvagya Paavan::0000-0003-1184-3225 | |
| dc.date.accessioned | 2023-01-20T09:46:25Z | |
| dc.date.available | 2022-11-07T02:55:18Z | |
| dc.date.available | 2023-01-20T09:46:25Z | |
| dc.date.issued | 2021 | |
| dc.identifier.doi | 10.1109/IPC48725.2021.9592989 | |
| dc.identifier.eisbn | 978-1-6654-1601-6 | |
| dc.identifier.issn | 2374-0140 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40691 | |
| dc.publisher | IEEE | |
| dc.source.conference | Annual Conference of the IEEE-Photonics-Society (IPC) | |
| dc.source.conferencedate | OCT 18-21, 2021 | |
| dc.source.conferencelocation | Vancouver | |
| dc.source.journal | na | |
| dc.source.numberofpages | 2 | |
| dc.title | Thin silicon layer as heat channel for low-loss SiN tunable devices | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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