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Investigation of cross-linking poly(methyl methacrylate) as a guiding material in block copolymer directed self-assembly

Date

2014
Proceedings Paper
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dc.contributor.authorSeidel, Robert
dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorRamirez-Hernandez, Abelardo
dc.contributor.authorWu, Hengpeng
dc.contributor.authorHer, Yougnjun
dc.contributor.authorYin, Jian
dc.contributor.authorGronheid, Roel
dc.contributor.authorNealey, Paul
dc.contributor.authorde Pablo, Juan
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorGronheid, Roel
dc.date.accessioned2021-10-22T05:39:42Z
dc.date.available2021-10-22T05:39:42Z
dc.date.embargo9999-12-31
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24504
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1854369
dc.source.beginpage90510K
dc.source.conferenceAdvances in Patterning Materials and Processes XXXI
dc.source.conferencedate23/02/2014
dc.source.conferencelocationSan Jose, CA USA
dc.title

Investigation of cross-linking poly(methyl methacrylate) as a guiding material in block copolymer directed self-assembly

dc.typeProceedings paper
dspace.entity.typePublication
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