Publication:

Double patterning process development at IMEC

Date

2008
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17804.pdf 4.19 MB

Author(s)

Maenhoudt, Mireille
;
Vangoidsenhoven, Diziana  
;
Vandeweyer, Tom  
;
Gronheid, Roel  
;
Versluijs, Janko  
;
Miller, Andy  

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1999 since deposited on 2021-10-17
Acq. date: 2026-02-27

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1999 since deposited on 2021-10-17
Acq. date: 2026-02-27

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