Publication:

Status of ArF lithography for the 130nm technology node

Date

2000

Proceedings Paper

Simple item page Full metadata Statistics

Files

4707.pdf 1.49 MB

Author(s)

;

Vandenberghe, Geert

;

Jaenen, Patrick

;

Delvaux, Christie

;

Vangoidsenhoven, Diziana

;

Van Roey, Frieda

;

Pollers, Ingrid

;

Maenhoudt, Mireille

;

Goethals, Mieke

;

Pollentier, Ivan

;

;

van Ingen Schenau, K.

;

;

;

;

Niroomand, Ardavan

Statistics

2011 since deposited on 2021-10-14

1last month

1last week

Acq. date: 2026-10-04