Publication:
Polarity dependence of bias temperature instabilities in Hf(x)Si(1-x)ON/TaN gate stacks
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1816 since deposited on 2021-10-16
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Acq. date: 2025-12-17
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1816 since deposited on 2021-10-16
1last month
1last week
Acq. date: 2025-12-17
Citations