Publication:

Electrical characterization of high-k materials prepared by Atomic Layer CVD (ALCVD)

Date

2001
Proceedings Paper
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Author(s)

Carter, Richard
;
Cartier, Eduard
;
Caymax, Matty  
;
De Gendt, Stefan  
;
Degraeve, Robin  
;
Groeseneken, Guido  
;
Heyns, Marc  
;
Kauerauf, Thomas
;
Kerber, Andreas
;
Kubicek, Stefan  
;
Lujan, Guilherme
;
Pantisano, Luigi
;
Tsai, Wilman
;
Young, Edward

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1952 since deposited on 2021-10-14
Acq. date: 2025-10-23

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1952 since deposited on 2021-10-14
Acq. date: 2025-10-23

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