Publication:
Vertical nanowire FET integration and device aspects
Date
| dc.contributor.author | Veloso, Anabela | |
| dc.contributor.imecauthor | Veloso, Anabela | |
| dc.date.accessioned | 2021-10-23T16:29:13Z | |
| dc.date.available | 2021-10-23T16:29:13Z | |
| dc.date.issued | 2016 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/27509 | |
| dc.identifier.url | http://ma.ecsdl.org/content/MA2016-01/23/1167.short | |
| dc.source.beginpage | 1167 | |
| dc.source.conference | Silicon Compatible Materials, Processes and Technologies for Advanced Integrated Circuits and Emerging Applications 6 | |
| dc.source.conferencedate | 29/05/2016 | |
| dc.source.conferencelocation | San Diego, CA USA | |
| dc.title | Vertical nanowire FET integration and device aspects | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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